Photo lithography systems

MicroWriter from Durham Magneto Optics (DMO)

The MicroWriter 3 is a direct-write photo lithography system. It is flexible and powerful and offers everything you need for high resolution combined with fast processing.

MicroWriter Baby is the smallest optical lithography machine in the world and is offered at an affordable price.

Features
High resolution
Fast writing speed
Easy-to-use
Cost effective
Flexible configuration

The MicroWriter 3 works with a 385 nm photo diode which can be used for g-, h- and i-line resists (positive and negative and SU-8). The system provides four different resolutions which easily can be switched via the software (0.6 µm, 1 µm, 2 µm and 5 µm). MicroWriter 3 includes an optical profilometer and a wafer inspection tool.

Additionally one can add either a 405 nm or a 375 nm photo diode.

Microwriter SpecificationML3 BabyML3 Baby PlusML3
Maximum substrate size155 mm x 155 mm x 7 mm230 mm x 230 mm x 15 mm
Maximum writing area149 mm x 149 mm195 mm x 195 mm
Exposure resolutions1 µm1 µm and 5 µm0,6 µm, 1 µm, 2 µm, 5 µm
Surface tracking autofocus systemyesyesyes
Greyscale lithographyyesyesyes
Alignment microscope objectivesx10x3, x10x3, x5, x10, x20
Automatic lens changer for exposure resolution and alignment microscopenoyesyes
Backside alignmentnonoavailable as option
Exposure wavelength405 nm385 nm
365 nm or 405 nm
second wavelength available as option
Maximum writing speed20 mm2/minute at 1 µm resolution20 mm2/minute at 1 µm resolution and 120 mm2/minute at 5 µm resolution25 mm2/minute at 0,6 µm resolution, 50 mm2/minute at 1 µm resolution, 100 mm2/minute at 2 µm resolution, 180 mm2/minute at 5 µm resolution
Overlay alignment accuracy at best resolution±1 µm±1 µm±0,5 µm
Minimum addressable grid200 nm100 nm
Motion stage minimum xy step size100 nm50 nm
Optical surface profiler z resolutionnot applicalble300 nm100 nm
Automatic wafer inspection toolnoyesyes
Virtual mask aligner toolnonoyes
Temperature stabilized enclosurenonoyes
Supplied with vibration isolating optical tablenonoyes
Mask design softwareavailable as optionyes
Can be upgraded to MicroWriter ML3 Baby Plusyesnot applicalble
Can be upgraded to MicroWriter ML3yesnot applicalble
Electrical contacts

Easy and rapid creation of different designs for electrical contacts.

Rapid Prototyping

The MicroWriter 3 is ideal for rapid prototyping due to the combination of high speed and high resolution.

Contacts

Request further information
Product Manager - Electron microscopy & Spectroscopy
+49 6151 8806-12
Fax: +49 6151 8806912

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