Nanopositioning devices

Queensgate Instruments, an Electron Technology brand, provides a range of market-leading nanopositioning and sensing tools for high-tech industries. A variety of designs also allows precision measurements in vacuum, radiation and cryogenic environments. The product range comprises nanopositioning devices like stages, actuators, translators and sensors together with control electrons and software for movements and placements in all-linear, rotational and tip-and-tilt axes. All stages, sensors and translators are highly customized to allow individual setups for a great variety of applications.

Queensgate Instruments was founded in 1978 as a spin-off from the Imperial College in London. They were the first to use capacitive metrology for nanopositioning. Coming from an academic background, Queensgate are firmly involved in state-of-the-art research and development.

Nanopositioners are closed-loop, piezo-actuated stages that provide sub-nanometer spatial resolution and travel ranges of hundreds of micrometers. All positioners feature short settle times and high linearity and are impervious to mass variations.

Available stage materials: Standard materials as listed in datasheets, Super Invar, Stainless steel, Titanium, Aluminum

Options: Vacuum, Radiation, High temperature compatibility

Custom designs available upon request.


By default, Queensgate’s nanopositioning actuators and translators hold a range of up to 120 microns or a blocking force of up to 35000 N. Customized solutions are available upon request.

Closed-loop DPT actuators incorporate capacitance feedback position sensors for low-hysteresis, high-accuracy positioning. Order Queensgate’s digital controller to gain complete plug-and-play interchangeability. For minimal off-axis deviations and ultimate motion accuracy, flexure guidance is available.

Open-loop MTP actuators are rugged, compact and cost-effective instruments. Use with stand-alone nanopositioning sensors to get a highly flexible, fully closed-loop system.


Queensgate’s nanopositioning sensors of the NanoSensor series are ultra-sensitive, non-contact position measuring systems. They are based on the principle of capacitance micrometry and allow high-precision displacement measurements. The two nanopositioning sensor plates Probe and Target are mounted opposite each other with an air gap (G) equalling the measurement range. One plate is secured to a fixed reference and the other to the moving part. Displacement is measured over the range 0.5 to 1.5 G. The NanoSensor has an extraordinary resolution range from a few picometers to 1.25 mm.


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