Desktop scanning electron microscope with integrated EDX-analysis

Phenom ProX from Thermo Fischer Scientific

The Phenom ProX desktop scanning electron microscope (SEM) is the ultimate all-in-one imaging and X-ray analysis system. It is equipped with a 4-quadrant backscattered electron detector to reach a resolution ≤ 10 nm (measured at gold with 10 kV and 6 mm working distance) and a magnification up to 150000x. The optional SE detector can be used for high resolution imaging of the sample topography. It reaches a resolution of 8 nm (at gold).

The key to the high performance is the combination of components: robust electron optics, high-end electron source (CeB6), patented sample container and an intuitive user interface.

The Phenom ProX is equipped with the ProSuite PC.

Resolution ≤ 10 nm, Magnification range from 80x – 15000x
Long-lifetime high-brightness source (CeB6)
Acceleration voltage settings between 4,8 and 15 kV for more functionality
EDX analysis, input count rates up to 300,000 cps, energy resolution ≤ 130 eV (@ Mn-Kα)
Sample loading time less than 30 seconds and motorized X-and Y-axis

Phenom ProX

With the Phenom ProX desktop SEM sample structures can be physically examined and their elemental composition determined with a fully integrated and specifically designed EDS detector.

EDS is a technique that analyzes X-rays generated by the bombardment of the sample by an electron beam. The Element Identification (EID) software package allows the user to program multiple point analysis and identify any hidden elements within the sample. The step-by-step guided process within the EID software helps the user to collect all X-ray results in an organized and structured way.

The mapping and line scan function is an option within the EID software package.

Phenom ProSuite

The Phenom Pro Suite was developed to enable Phenom users to extract maximum information from images made with the Phenom desktop scanning electron microscope (SEM)

  • Automated Image Mapping
    Enables automated collection of multiple images in a regular grid
  • Remote User Interface
    Enables the users to access the Phenom desktop SEM from a different location
  • 3D Roughness Reconstruction (option)
    For generation of three-dimensional images and sub-micrometer roughness visualization
  • Particlemetric (option)
    Fully automated measurements and visual exploration of nano scaled particles
  • Porometric (option)
    Allows the user to gather data on distribution of pores and pore parameters like pore size and aspect ratio
  • Fibermetric (option)
    Automated and accurate size information from micro and nano fiber samples

Phenom Sample Holders

All Phenoms (beside Phenom XL) are delivered with the standard sample holder. Optimized for best imaging results and able to accommodate 3D samples mounted on standard sample pin stubs.

Optional Sample Holders

  • Charge Reduction Sample Holder
    Designed to reduce sample charging and eliminate extra sample preparation of non-conductive samples
  • Metallurgical Sample Holder (also available in charge reduction version)
    This holder is designed to support resin-mounted samples and is the preferred solution for metallurgy and when working with inserts
  • Tilt & Rotation Sample Holder
    The Motorized Tilt & Rotation Sample Holder allows analysis of the sample from all visible sides and enables a unique 3D image of your sample. The Motorized Tilt & Rotation Sample holder is a so-called smart sample holder that does not have any cables attached
  • Temperature Controlled Sample Holder (-25 °C to +50 °C)
    This active sample holder is based on the Peltier principle and designed in a way that the temperature can be adjusted quickly and easily. This minimizes the effect of the electron beam and vacuum damage of the samples
The backscattered electron detector can be operated in either material contrast or topography contrast mode
Charge reduction mode minimizes charging and beam damage of isolating and fragile samples
Acceleration voltage settings in 0,1 kV steps between 4,8 kV and 15 kV give access to surface sensitive investigations and an improved resolution investigating light elements
The combination of imaging and elemental analysis allows a fast and non-destructive characterization of materials
Low-emission current mode available for high resolution SE imaging

“The application of the table top SEM instead of an optical microscope allowed to extent the magnification range beyond the typical light-optical limit of 1000x, to collect more information about the sample due to the backscattered electron signal (topo and compositional information) and to maintain simple device operation supporting a quick micro structural sample characterization at reasonable costs.”

Mark Kappertz, Micro-/nanostructure diagnostics working group, Institute of Energy Research, Research Center Jülich GmbH (FZJ) in Germany

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Product Manager - Electron microscopy
+49 6151 8806-21
Fax: +49 6151 8806921

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