Dates 2019: March 11th, 13h, 18th, 20th, 25th, and 27th.
CompleteEASE Course Online Training 2019
LOT-QuantumDesign GmbH, Darmstadt
-----Start of each session: 14:00 CET (Central European Time, German Time)----
LOT-QuantumDesign GmbH together with the J.A. Woollam Co., Inc. is happy to announce the first Online Training course on CompleteEASE Ellipsometry Data Analysis that targets intermediate to advanced user. Students should have at least some ellipsometry experience and a proficiency with CompleteEASE software. The course will spread over three weeks, with two 2 hours online training sessions per week.
This course introduces the user to the model building and analysis of ellipsometric data, using the J. A. Woollam CompleteEASE software. The instructors will introduce a variety of analysis strategies using data from real samples.
Participants will be able to download pdf copies of the training sessions. Many of the practice examples introduced during the lectures are also discussed in detail in the pdfs and will be provided after the course.
In addition to internet-sessions, students will receive example data sets in order to practice the strategies discussed during the sessions.
We strongly recommend that you practice these examples. It is the only way to really learn the software and analysis procedures.
After students complete the example data sets, in case of questions they can consult the instructor by email submitting their analysis as CompleteEASE Snapshot files.
Certificates of Participation will be given to registered participants who followed all the sessions.
|Session 1 : Intro to Ellipsometry ||The first session is a review the basics of ellipsometric theory, model building and data fitting. The basics of the CompleteEASE model building and analysis will be introduced, followed by analysis examples from several semiconductor substrates.|
|Session 2: Transparent substrates & films ||Students learn how use the Cauchy dispersion equation to describe the index of transparent materials. They will also learn how thickness and index affect interference oscillations in ellipsometric data, and use that knowledge to determine thickness and index of transparent films of unknown materials. Surface roughness (Effective Medium Approximation), graded index films, and global fitting will be introduced.|
|Session 3: Absorbing Films & B-Spline ||Almost all materials are absorbing over some portion of the measured spectral range. Modeling data form absorbing spectral regions requires different strategies and different functions than the ones applied to transparent spectral regions. We will introduce and practice B-Spline function to address modelling of absorbing materials as well as introduce simplified procedure from transparent Cauchy to absorbing B-Spline and the Generalized Oscillator (GenOsc) layer, which allows the user to create parameterized functions of transparent & absorbing materials, and has certain advantages over the point-by-point method.|
|Session 4: Semi-Absorbing Films using Gen-Osc Layer ||We will introduce Generalized Oscillator (GenOsc) layer, which allows the user to create parameterized functions of transparent & absorbing materials, and has certain advantages over the B-Spline. Students will be introduced to different strategies to fit ellipsometric data using the Genosc layer.|
|Session 5: Absorbing materials ||Special measurement and analysis strategies are often required for materials that absorb at all wavelengths (such as metals). We will review three of those strategies, and demonstrate them with examples.|
|Event. Session 6: Wrap-up and Review ||Depending on the request, we will wrap-up and discuss open topics and will closes the course with a review session.|
Registration CompleteEASE Online Training Course 2019
Deadline for registration is February 18th, 2019.
Registration fee for the CompleteEASE Online Training Course:
200,- € net regular registration
150,- € net student registration - on request (not applicable to PhD students)
Registration fee includes:
- invitation to online training course
- pdf copies of the presentations
- All demo data files used in the sessions
- offer to consult the lecturer for support
- Any additional data files required for the homework
- Some additional reference material
- Latest CompleteEASE version
The number of participants for the seminar is limited to 20 persons. After receiving your registration we will send a short confirmation and shortly after the invoice.
Final confirmation including invitation to login to the GoToTraining software will be sent app. 1 week before the first session and after the payment had been done.
Cancellation policy: In case of cancellation after payment was done, no refund is given.